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Application overview of vacuum heat treatment process under different vacuum conditions

Application of Vacuum Heat Treatment Processes under Different Vacuum Conditions
As the density of gas molecules decreases in the gaseous state, the physical properties of the gas undergo significant changes. Based on this change in gas properties, various vacuum heat treatment processes are applied under different vacuum conditions to achieve production and scientific research goals.

From the manufacture of ultra-large-scale integrated circuits (VLSIs) with hundreds of electronic components per square centimeter, to the operation of large accelerators several kilometers long, from the production of civilian decorations to the creation of artificial satellites and space shuttles, all are closely related to vacuum heat treatment technology.

The following table summarizes the application of vacuum heat treatment technology under different vacuum conditions.

Vacuum heat treatment state	Gas Properties	Application Principle	Application Overview
Rough vacuum: 10⁵~10³Pa 760~10Torr	Compared with normal pressure, the gas state only changes from a large number of molecules to a small number, but there is no change in the spatial characteristics of the gas molecules. Molecules collide with each other frequently.	The mechanical application of vacuum is realized by using the force generated by the pressure difference between vacuum and atmosphere and the principle of uniformity of differential force.	1. Vacuum suction and transport of solids, liquids, colloids, and particles; 2. Vacuum lifting and vacuum medical equipment; 3. Vacuum forming and replicating relief sculptures; 4. Vacuum filtration; 5. Vacuum impregnation.
Low vacuum:10³~10^-1Pa 10~10^-3Torr	The collisions between gas molecules and between molecules and the wall are comparable, and the density of gas molecules is relatively low.	The reduction of gas molecule density can achieve non-oxidative heating. The principle that heat conduction and convection of gas gradually disappear when the gas pressure decreases can be used to achieve vacuum insulation and insulation. The principle that the boiling point of liquid decreases when the pressure decreases can also achieve vacuum freezing and vacuum drying.	1. Vacuum melting, degassing, casting, and heat treatment of ferrous metals; 2. Vacuum hot rolling and vacuum surface chromizing; 3. Vacuum insulation and vacuum thermal insulation; 4. Vacuum distillation of drugs, oils, and polymer compounds; 5. Vacuum freezing and vacuum drying; 6. Vacuum packaging and vacuum inflation packaging; 7. Low-pressure wind tunnels for high-speed aerodynamic experiments
High vacuum:10^-1~10^-6Pa 10^-3~10^-8Torr	There are very few collisions between molecules, but frequent collisions between molecules and the wall, and the density of gas molecules is low.	Vacuum metallurgy, vacuum coating and vacuum device production are carried out by taking advantage of the low density of gas molecules and the weak chemical reaction between any substance and residual gas molecules.	1. Vacuum melting and refining of rare metals, ultrapure metals, and alloys; vacuum reduction metallurgy of commonly used structural materials; 2. Vacuum distillation and refining of pure metals; radioisotope evaporation; 3. Vacuum sintering of refractory metals; 4. Manufacturing of high-temperature metallographic microscopes and high-temperature material laboratory equipment; 5. Surface modification through vacuum coating, ion implantation, and film-etching; 6. Manufacturing of electro-optical tubes, ion tubes, electron source tubes, electron beam tubes, electron diffractometers, electron microscopes, X-ray microscopes, various particle accelerators, energy spectrometers, nuclear radiation spectrometers, neutron tubes, and gas lasers for the electric vacuum industry; 7. Electron beam degassing, electron beam welding, zone melting, and electron beam heating.
Ultra-high vacuum:10^-1~10^-6 Pa 10^-1~10^-8 Torr	The density of gas molecules is low and the number of collisions with the wall is very small, which increases the time it takes to form a single molecular layer on the surface. In the gaseous space, there are only the atoms of the solid itself and almost no other atoms or molecules.	The study of surface physics and surface chemistry is achieved by taking advantage of the fact that the density of gas molecules is extremely low and they rarely collide with the surface, and that it takes a long time for a single molecular layer to form on the surface.	1. Fabrication of a time-standard hydrogen molecular mirror; 2. Research on surface physics and chemistry; 3. Simulation of the outer space environment; 4. Operation of a large synchrotron proton accelerator; 5. Fabrication of an electromagnetically suspended high-precision gyroscope.

Vacuum heat treatment processes under different vacuum conditions have extensive and in-depth applications across various fields. From low vacuum applications in simple material handling, to medium vacuum applications in the electronics industry and some coating applications, to the critical role of high vacuum in aerospace and high-end scientific research, these vacuum heat treatment technologies continue to drive development in related fields.

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