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How is the vacuum process carried out in a vacuum furnace?

As the density of gas molecules in the gaseous space decreases, the physical properties of the gas change significantly. Based on this change in gas properties, people apply various vacuum processes under different vacuum conditions in the vacuum furnace to achieve the purpose of serving production and scientific research.
It can be said that from the manufacture of ultra-large-scale integrated circuits with hundreds of electronic components per square centimeter surface to the operation of large accelerators several kilometers long, from the production of civilian decorations to the advent of controlled nuclear fusion, artificial satellites, and space shuttles, they are all closely related to the vacuum process technology in the vacuum furnace.
The application overview of vacuum process technology under different vacuum furnace conditions is shown in the following table

Vacuum state	Gas properties	Application principle	Application overview
Rough vacuum 10⁵ ~10³Pa 760~10 Torr	Compared with normal pressure, the gas state only changes from more to less molecules, but there is no change in the spatial characteristics of gas molecules. Molecules collide frequently with each other.	The mechanical application of vacuum is realized by using the force generated by the pressure difference between vacuum and atmosphere and the principle of uniformity of differential force.	1. Vacuum suction and transportation of solids, liquids, colloids and particles; 2. Vacuum suction cup lifting, vacuum medical equipment; 3. Vacuum forming, replicating relief; 4. Vacuum filtration; 5. Vacuum impregnation.
Low vacuum 10³~10^-1Pa 10~10^-3Torr	The collisions between gas molecules and between molecules and the wall are similar, and the density of gas molecules is relatively small.	The reduction of gas molecule density can achieve non-oxidative heating. The principle that the heat conduction and convection of the gas gradually disappear when the gas pressure decreases can be used to achieve vacuum insulation and insulation. The principle that the boiling point of the liquid decreases when the pressure decreases can also be used to achieve vacuum freezing and vacuum drying.	1. Vacuum melting, degassing, casting and heat treatment of ferrous metals; 2. Vacuum hot rolling, vacuum surface chromizing; 3. Vacuum insulation and vacuum heat insulation; 4. Vacuum distillation of drugs, oils and polymer compounds; 5. Vacuum freezing and vacuum drying; 6. Vacuum packaging, vacuum inflation packaging; 7. Low-pressure wind tunnels in high-speed aerodynamic experiments
High vacuum 10^-1~10^-6 Pa 10^-3~10^-8Torr	There are very few collisions between molecules, but frequent collisions between molecules and the vessel wall, and the density of gas molecules is low.	Vacuum metallurgy, vacuum coating and vacuum device production are carried out by taking advantage of the low density of gas molecules and the weak chemical reaction between any substance and residual gas molecules.	1. Vacuum melting and refining of rare metals, ultra-pure metals and alloys, and semiconductor materials; vacuum reduction metallurgy of commonly used structural materials; 2. Vacuum distillation and refining of pure metals; evaporation of radioactive isotopes; 3. Vacuum sintering of refractory metals; 4. Vacuum purification and crystal preparation of semiconductor materials; 5. Manufacturing of high-temperature metallographic microscopes and high-temperature material experimental equipment; 6. Vacuum coating, ion implantation, film-etching and other surface modifications; 7. Manufacturing of electro-optical tubes, ion tubes, electron source tubes, electron beam tubes, electron diffractometers, electron microscopes, X-ray microscopes, various particle accelerators, energy spectrometers, nuclear radiation spectrometers, neutron tubes, and gas lasers in the electric vacuum industry; 8. Electron beam degassing, electron beam welding, zone melting, electron beam heating
Ultra-high vacuum 10^-1~10^-6Pa 10^-1~10^-8Torr	The density of gas molecules is low and the number of collisions with the container wall is very small, which increases the time it takes to form a single molecular layer on the surface. In the gaseous space, there are only the atoms of the solid itself and almost no other atoms or molecules.	The study of surface physics and surface chemistry is achieved by using the principle that the density of gas molecules is extremely low and there are very few collisions with the surface, and it takes a long time for a single molecular layer to form on the surface.	1. Research on surface physics and surface chemistry; 2. Simulation of space environment; 3. Operation of large synchrotron proton accelerator; 4. Fabrication of electromagnetically suspended high-precision gyroscope.

Vacuum furnace technology under different vacuum conditions has extensive and in-depth applications in various fields. From the application of low vacuum in simple material transportation, to the role of medium vacuum in the electronics industry and some coating fields, to the key position of high vacuum in aerospace and high-end scientific research experiments, and the indispensability of ultra-high vacuum in cutting-edge science and high-end semiconductor manufacturing, these vacuum furnace equipment and technology continue to promote the development of related fields.

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